YPH

YPH

YPH series of high-purity hydrogen production equipment can produce hydrogen with a purity of 99.999%, and is applied in scenarios with a large demand for hydrogen (150~500Nm’/h). It is mainly used to replace hydrogen in tube bundle vehicles, solve the storage and transportation problems of hydrogen, and significantly reduce the cost of hydrogen use.

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Features

  • Ultra-High Purity Hydrogen – ≥99.9999%, suitable for semiconductor-grade applications.

  • Advanced Purification – PSA purification with optional Pd membrane for ultra-trace impurity removal.

  • Stable Output – Designed for continuous operation with minimal fluctuation.

  • Custom Integration – Can be tailored to match cleanroom requirements.

  • Automated Control – Intelligent monitoring with data logging and alarm functions.

  • Compact Design – Skid-mounted for quick installation in industrial facilities.

Applications

  • Semiconductor manufacturing

  • Flat panel display production

  • Optical fiber drawing

  • Specialty material processing

  • Electronics assembly requiring ultra-pure hydrogen

Technical Specifications

High-purity hydrogen(5N)(hydrogen produced from methanol +PSA)
Purity
(vol%)		 PAH
(MPaG)		 Dew
point
(℃)		 hydrog
en
(℃)		 Equipment
lifespan
(Year)		 Flow range
(%)		 Hydrogen purification mode
≥99.999 ≤1.3 -73 ≤40 15 30-110 PSA一级提纯
Gas
production
(Nm³/h)		 ( Electricity
(L/h)		 pump
power
(kW)		 Installed
power
(kW)		 circulate
(t/h)		 instrument
air
(Nm³/h)		 Size
(L×W×Hmm)
150 88 100 135 220 10 10 8800*3200*3200
200 116 130 180 270 10 10 10500*3300*3200
250 145 160 225 310 15 10 10500*3300*3200
350 205 230 315 400 15 15 11300*3200*3770
400 235 260 360 520 20 15 11300*3460*3770
500 290 320 450 665 20 15 13570*3460*3950
Note:1.The above dimensions are those of the skid-mounted explosion-proof hydrogen production equipment,including the hydrogen production system,PSA
purification system,explosion-proof control system,cold water system,heating system,and mixing system(the specific dimensions may vary slightly due to
actual production,and the physical product shall prevail).The dimensions of the desalinated water system are not included.Our company’s service scope
includes complete sets of equipment supply,on-site installation,technical services and training.2.The above operation tasks are for reference only.The
actual operation conditions shall prevail.

Advantages

  • Meets 6N Purity Standards – Ideal for electronics, optics, and precision industries.

  • Reduced Contamination Risk – Palladium membrane option ensures ultra-low CO, CO₂, and O₂ levels.

  • Energy Efficient – Optimized methanol reforming process lowers operating costs.

  • High Reliability – Engineered for 15 years of continuous operation.

  • Flexible Capacity – Ranges from 50 to 200 Nm³/h to suit different production scales.

  • Industry Compliance – Meets semiconductor and electronics industry gas supply standards.

Service

  • Pre-Sales – Requirement analysis and purity specification matching.

  • Delivery – Fully tested hydrogen generation and purification system.

  • Installation & Commissioning – On-site setup, cleanroom compliance verification.

  • Training – Operation and safety training for cleanroom environments.

  • After-Sales – Technical hotline, remote diagnostics, and spare parts support.

  • Upgrades – Palladium membrane retrofit and capacity expansion options.

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  • +86 181 0010 1925
  • +86 181 0010 1925
  • dereksi@hyvoda.com
  • 12th Floor, Block C, Junlong Plaza,99 NanjingRoad, Heping District, Tianjin
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